Haffner, C. et al. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Boes, A., Corcoran, B., Chang, L., Bowers, J. 11, 441446 (2017). The demonstration of energy efficient and high-speed EOM at the wavelength scale paves an important step for device miniaturization and high-density photonic integration on the monolithic LN platform, which is expected to find broad applications in communication, computing, microwave signal processing, and quantum photonic information processing. Photonics 13, 8090 (2019). It has a bias control section that integrates with a tap monitor for stable operation. b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. 6c, where a driving power of 16mW (corresponding peak-to-peak driving voltage, Vpp, of Vpp=2.5V) splits the cavity resonance into five with notable magnitudes (black curve), resulting in a cavity transmission with five side lobes (blue curve). These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. If material is not included in the articles Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. External modulator is typically either a LiNbO3 modulator or an electroabsorptive modulator. Mercante, A. J. et al. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Thank you for visiting nature.com. http://www.fujitsu.com/jp/group/foc/en/products/optical-devices/100gln/, Eospace 2017 Advanced Products. New light sheet holography overcomes the depth perception challenge in 3D holograms, First-of-its-kind metalens can focus extreme ultraviolet light, An unprecedented look at biological energy on the sub-cellular level, Harvard John A. Paulson School of Engineering and Applied Sciences. Lett. High-speed plasmonic modulator in a single metal layer. Power efficiency is crucial for the application of electro-optic modulator (EOM), which depends sensitively on the physical size of the device27. Opt. Nature 562, 101104 (2018). Photon. Here, we present a heterogeneously integrated EOM based on the lithium niobate-on-insulator (LNOI) platform. Quantum frequency conversion and single-photon detection with lithium niobate nanophotonic chips, Integrating planar photonics for multi-beam generation and atomic clock packaging on chip, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, http://www.fujitsu.com/jp/group/foc/en/products/optical-devices/100gln/, http://eospace.com/pdf/EOSPACEbriefProductInfo2017.pdf, https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948, https://doi.org/10.1109/CSICS.2015.7314513. The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. 3 Electrical eye diagram at 100Gbaud. The flexible electro-optic modulation shown here may offer a convenient method for controlling the spectrotemporal properties of photons inside the cavity and for creating exotic quantum states48 that are crucial for quantum photonic applications. Weigel, P. O. et al. 35, 411417 (2017). 50-Gb/s silicon optical modulator. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in Preprint at https://arxiv.org/abs/1803.10365 (2018). Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. Rao, A. et al. Laser Photonics Rev. However, negligible degradation observed between Fig. J. Lightwave Technol. Deep learning with coherent nanophotonic circuits. Photon. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Opt. Zhou, B., Li, E., Bo, Y. Figure8b, c shows the numerically simulated tuning efficiency and the corresponding optical Q, respectively. Further increase of the modulation frequency shifts apart the two side lobes accordingly, with amplitude decreased, while the position of the center lobe remains unchanged, as expected from the non-adiabatic driving. The scale bar on the left represents the strength of normalized electrical field (Enorm) for d, f, g. The photonic-crystal cavity is oriented along the y-axis such that the dominant optical field is in parallel with the optical axis of underlying LN medium (Fig. A review of lithium niobate modulators for fiber-optic communications systems. The inset of a shows the measured normalized transmission (NT) on a logarithmic scale, revealing an extinction ratio of 30 dB. In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. c Detailed spectrum (blue) with RF driving signal at 2.0GHz with a power of 16mW. High-speed plasmonic modulator in a single metal layer. 7a. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. Nature Opt. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Extended Data Fig. Open Access Reference [18] has recently emerged as a promising approach to realize integrated EO modulators with stronger optical connement and high EO efciencies while occupying a smaller footprint [4], [19]-[22]. The current generation of lithium niobate modulators are bulky, expensive, limited in bandwidth and require high drive voltages, and thus are unable to reach the full potential of the material. Optical modulators, using acousto-optic, magneto-optic or electro-optic effects, as the principal components for external modulation of lightwaves, have presently played the important role in modern long-haul ultra-high speed optical communications and photonic signal processing systems. Nat. Xinlun Cai, of Sun Yat -sen University, led a team that designed and fabricated a thin-film lithium niobate (TFLN) dual polarization in-phase and quadrature (DP-IQ) modulator, which sets new world . The devices exhibit a significant tuning efficiency up to 1.98 GHz V -1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m 3. Get the most important science stories of the day, free in your inbox. ADS In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. Publishers note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. 35, 14501455 (2017). When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. Li, M., Ling, J., He, Y. et al. Liu et al. Nat. IEEE J. Quantum Electron. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. PubMedGoogle Scholar. The green region indicates the electrode that can be shrunk to in the future design. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. The inset shows the S11 reflection scattering parameter for both devices. Figure6d shows an example. The sum of all gray curves is showed in red, which is fitted by the theory. Fortier, T. M. et al. Low V silicon photonics modulators with highly linear epitaxially grown phase shifters. Zhang, M., Wang, C., Cheng, R., Shams-Ansari, A. performed numerical simulations. Koeber, S. et al. Opt. Express 23, 2274622752 (2015). Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. 1 Ultra-high-linearity integrated lithium niobate electro-optic modulators Hanke Feng1, Ke 1Zhang1, Wenzhao Sun , Yangming Ren2,3, Yiwen Zhang1, Wenfu Zhang2,3 & Cheng Wang1* 1Department ofElectricalEngineering&StateKeyLaboratory TerahertzandMillimeterWaves, City University of Hong Kong, Kowloon, Hong Kong, China 2Institute of Optics and Precision Mechanics, Chinese Academy of Sciences . Appl. fabricated the device. g Simulated optical mode field profile of the second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\). Thin-film lithium niobate (TFLN) based traveling-wave modulators maintain simultaneously excellent performances, including large modulation bandwidth, high extinction ratio, low optical loss, and high modulation efficiency. & Lin, Q. Quantum correlations from dynamically modulated optical nonlinear interactions. ac, Normalized optical transmission of the 20-mm (a), 10-mm (b) and 5-mm (c) device as a function of the applied voltage, showing half-wave voltages of 1.4V, 2.3V and 4.4V, respectively. 29 Oxford Street, Cambridge, MA 02138, Research paves the way for high-powered telecommunication systems, 2023 President and Fellows of Harvard College, First integrated laser on lithium niobate chip. Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. Wood, M. G. et al. Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. Nat. Thin-lm lithium niobate on insulator (LNOI) platform. Its low operating voltage makes it convenient to use a function generator as the driver. 8, 701705 (2014). By placing the metal electrodes on top and bottom of the waveguide rather than the usual lateral configuration, the electric field is fully overlapping the optical field. Quant. On the other hand, the electrodes are currently placed far from the photonic-crystal cavity so as to leave the optical mode intact to achieve a high optical Q. A second exposure is then performed to define the waveguide structure, which is partially etched by 150nm with the same process. & Capmany, J. CAS On chip, the lasers sit in small wells or trenches etched into the lithium niobate and deliver up to 60 milliwatts of optical power in the waveguides fabricated in the same platform. As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. IEEE J. Sel. The laser wavelength is scanned at a repetition rate of ~15Hz, so we primarily monitored the time-averaged cavity transmission. J. Lightwave Technol. Its a building block that can be integrated into larger optical systems for a range of applications, in sensing, lidar, and data telecommunications.. https://doi.org/10.1038/s41586-018-0551-y, Complementary Metal Oxide Semiconductor (CMOS). They are close to those of a conventional Mach-Zehnder modulator with a straight modulation section. Advanced optical modulation formats. Photonics 13, 359364 (2019). ADS 6, 6982 (2000). Nat. CAS 3). 27), which is about 22fJ per bit in our EOM. Opt. Light Sci. OBrien, J. L. Optical quantum computing. a Schematic of the LN photonic-crystal EOM. Sorting out light. Express 20, 2246522474 (2012). Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. Ozaki, J., Ogiso, Y. Miller, D. A. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. Express 27, 1985219863 (2019). The key modulation waveguide structure is a field-enhanced slot waveguide formed by embedding silicon nanowires in a thin-film lithium niobate (LN), which is different from the previously . Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. Lett. Nature 435, 325327 (2005). Light Sci. Appl. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. Photonics 2, 433437 (2008). & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. For example, LNOI phase modulators with relatively low In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. Quant. Nature 568, 373377 (2019). Review and perspective on ultrafast wavelength-size electro-optic modulators. NTT Tech. Extended Data Fig. 1a, d). Light is coupled into and out of the EOM chip via one lensed fiber. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, said, , the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. 1a), where an injector section (Fig. High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation. Enhanced electro-optic lithium niobate photonic crystal wire waveguide on a smart-cut thin film. 1e). Hybrid Silicon and Lithium Niobate Modulator Abstract: Hybrid Lithium Niobate (LN) and Silicon photonic (SiPh) integration platform has emerged as a promising candidate to combine the scalability of silicon photonics with the excellent modulation performance of LN. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. 1 Half-wave voltages of devices with different active lengths. Rao, A. et al. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. Input Requirements LiNbO 3 supervised the project. Express 26, 15471555 (2018). Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. CAS Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. Input requirements, test setups, and mounting instructions will be covered. Google Scholar. a Full SEM image of the whole-device structure. 6, 488503 (2012). Nature 507, 341345 (2014). Rev. Electro-optic modulators translate high-speed electronic signals into the optical domain and are critical components in modern telecommunication networks1,2 and microwave-photonic systems3,4. Opt. They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. Google Scholar. Opt. Electron. RT @OpticaPubsGroup: View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly . 1541959. Opt. a, Set-up for measuring the modulator electro-optic responses from 35GHz to 100GHz. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. LiNbO. A conventional modulator (b) also uses a buffer oxide layer for velocity matching, but on top of LN which further compromises the electro-optic overlap. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. The blue open circles show the dielectric and air bands. We provide a standard modulator package, as well as customized modulator chips, packages and services for integration . Increasing the electrical driving power now does not perturb the positions of the resonance dips, but rather changes their relative magnitudes since the magnitudes of the created sidebands depends on the driving amplitude48. Wooten, E. L. et al. Low-loss plasmon-assisted electro-optic modulator. Article The metal electrode layer (10nm Ti/500 nm Au) was deposited by an electron-beam evaporator and the electrode structure was formed by a lift-off process via ZEP-520A. The authors declare no competing interests. Opt. Tzuang, L. D., Fang, K., Nussenzveig, P., Fan, S. & Lipson, M. Non-reciprocal phase shift induced by an effective magnetic flux for light. On the other hand, the 30-m length of the electrode is overly conservative since it covers the full length of photonic-crystal structure including the injector, mirrors, and the cavity (Figs. wrote the manuscript with contribution from all authors. Lett. Winzer, P. J. 28, 736739 (2016). The 50-m width of the electrode (Fig. & Lin, Q. High-Q 2D lithium niobate photonic crystal slab nanoresonators. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Appl. The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. Provided by the Springer Nature SharedIt content-sharing initiative. This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. PubMed All of these applications require chip-scale electro-optic modulators that operate at voltages compatible with complementary metaloxidesemiconductor (CMOS) technology, have ultra-high electro-optic bandwidths and feature very low optical losses. Wlbern, J. H. et al. Technol. This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No. Generation of ultrastable microwaves via optical frequency division. Silicon optical modulators. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. a is the lattice constant. Ayata, M. et al. Miller, D. A. 27 March 2023, Receive 51 print issues and online access, Get just this article for as long as you need it, Prices may be subject to local taxes which are calculated during checkout. Consequently, the transmission spectrum transforms into a multi-resonance spectrum (Fig. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. CAS Optica 6, 860863 (2019). Low loss InP C-band IQ modulator with 40GHz bandwidth and 1.5V V B. Attojoule optoelectronics for low-energy information processing and communications. Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. 6a, with a broadened spectral linewidth dependent on the driving power. Optica 4, 12511258 (2017). Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. Figure2 shows a fabricated device (see Methods for the details of device fabrication). 1e and 2). Femtojoule electro-optic modulation using a silicon-organic hybrid device. Opt. Shakoor, A. et al. Loncar and his team used small but powerful distributed feedback lasers for their integrated chip. 34, 29412951 (2016). Laser Photonics Rev. A typical design requires a full air cladding to improve the optical quality factor43,45,46. Photon. C.W., M.Z. For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). Sun, C. et al. Rep. 7, 46313 (2017). High-quality lithium niobate photonic crystal nanocavities. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376.
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